The Center for X-Ray Optics is a multi-disciplined research group within Lawrence Berkeley National Laboratory's (LBNL) Materials Sciences Division (MSD). Notice to users.

Precision Engineering

Building the tools that make nanoscience possible.

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Zone plates

Diffractive lenses for a new generation of x-ray beamlines.

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Interferometry

Wavefront control with
sub-angstrom sensitivity

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Optical Coatings

Precision optical coatings for soft
x-ray and EUV applications worldwide.

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EUV Lithography

The world's highest resolution projection lithograph tool.

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EUV Mask Imaging

The world's highest performance
EUV mask inspection tool.

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Reflectometry

The world standard for EUV and
x-ray reflectance measurements.

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Holography

Systematically controlling spatial
and temporal coherence in short wavelength optical systems.

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Education

Inspiring and preparing the next generation of scientists, engineers,
and educators.

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Nanomagnetism

High resolution imaging of nanoscale magnetic stcutrures.

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Careers

Exciting opportunities in optics, engineering, and nanofabrication.

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The Center for X-Ray Optics

The Center for X-Ray Optics at Lawrence Berkeley National Laboratory works to further science and technology using short wavelength optical systems and techniques. We create and operate advanced experimental systems to address national needs, support research in material, life, and environmental science, and extend the forefront of semiconductor manufacturing.

"CXRO is a one-of-a-kind facility with over 25 years of experience providing short wavelength optical solutions. From instrument development to scientific discovery, our vertically integrated structure allows us to tackle a full spectrum of research."

Patrick Naulleau
CXRO Director

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News

CXRO launches a website dedicated to Fresnel zone plate theory, design, tolerancing, fabrication, and applications.

CXRO's new website, zoneplate.lbl.gov, provides a full spectrum of information related to the theory, design, tolerancing, and fabrication of Fresnel zone plates. It is separated in to five main areas:

  • Zone plate theory: Fresnel zone plate theory and equations. Learn about zone locations, resolution, bandwidth restrictions, and field of view.
  • Zone plate design: An easy-to-use zone plate generator / calculator that creates zone plate GDS files to match the wavelength, imaging conjugates, and constraints that the user provides.
  • Zone plate tolerancing: Learn how fabrication tolerances affect system performance and how to spec zone plates to optimize performance and minimize fabrication complexity.
  • Zone plate fabrication: Learn about fabrication techniques, materials, limitations, and how they impact zone plate performance.
  • Zone plate applications: Learn how zone plates enable and impact science and industry around the world.

Read more news highlights

Explore the Center for X-Ray Optics

X-Ray Database
Nanomagnetism
X-Ray Microscopy
EUV Lithography
EUV Mask Imaging
Reflectometry
Zoneplate Lenses
Coherent Optics
Nanofabrication
Optical Coatings
Engineering
Education
Careers
Publications

Contact CXRO

General Information
Administration and Budget
Personnel
Beamlines and Facilities

CXRO Documents

X-Ray Data Booklet
CXRO Intro Booklet
CXRO Logos

Other Resources

LBNL
Materials Science Division
U.S. Department of Energy

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