Precision Engineering
Building the tools that make nanoscience possible.
Zone plates
Diffractive lenses for a new generation of x-ray beamlines.
Interferometry
Wavefront control with
sub-angstrom sensitivity
Optical Coatings
Precision optical coatings for soft
x-ray and EUV applications worldwide.
EUV Lithography
The world's highest resolution projection lithograph tool.
EUV Mask Imaging
The world's highest performance
EUV mask inspection tool.
Reflectometry
The world standard for EUV and
x-ray reflectance measurements.
Holography
Systematically controlling spatial
and temporal coherence in short wavelength optical systems.
Education
Inspiring and preparing the next generation of scientists, engineers,
and educators.
Nanomagnetism
High resolution imaging of nanoscale magnetic stcutrures.
Careers
Exciting opportunities in optics, engineering, and nanofabrication.
The Center for X-Ray Optics
The Center for X-Ray Optics at Lawrence Berkeley National Laboratory
works to further science and technology using short wavelength optical
systems and techniques. We create and operate advanced experimental
systems to address national needs, support research in material, life,
and environmental science, and extend the forefront of semiconductor
manufacturing.
"CXRO is a one-of-a-kind facility with over 25 years of experience providing
short wavelength optical solutions. From instrument development to scientific
discovery, our vertically integrated structure allows us to tackle a full
spectrum of research."
Patrick Naulleau
CXRO Director
News
CXRO launches a website dedicated to Fresnel zone plate theory, design, tolerancing, fabrication, and applications.
CXRO's new website, zoneplate.lbl.gov, provides a full spectrum of information related to the theory, design, tolerancing, and fabrication of Fresnel zone plates. It is separated in to five main areas:
- Zone plate theory: Fresnel zone plate theory and equations. Learn about zone locations, resolution, bandwidth restrictions, and field of view.
- Zone plate design: An easy-to-use zone plate generator / calculator that creates zone plate GDS files to match the wavelength, imaging conjugates, and constraints that the user provides.
- Zone plate tolerancing: Learn how fabrication tolerances affect system performance and how to spec zone plates to optimize performance and minimize fabrication complexity.
- Zone plate fabrication: Learn about fabrication techniques, materials, limitations, and how they impact zone plate performance.
- Zone plate applications: Learn how zone plates enable and impact science and industry around the world.
Read more news highlights