Research
Thrust 1
Thrust 2
Thrust 3
Publications
Strategic Research Plan
Strategic Plan Diagram Select the image to the left to view a high resolution version of the graphic |
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The strategic plan for the ERC research is designed to realize its vision: to make EUV light sources widely accessible and useful for solving challenging scientific and technological problems. To accomplish this, a major coordinated effort in three areas is being pursued:
Thrust 1: Engineered EUV Sources: the development of compact,
cost-effective, coherent EUV light sources that provide unique capabilities.
Thrust 2: Imaging, Patterning and Metrology: applications of EUV light sources.
Thrust 3: Novel Linear and Non-Linear Spectroscopies: contributions to fundamental
knowledge in laser and EUV science and technology, optics, and plasma physics.
Research at the ERC is structured around two major testbed systems: A1) EUV Light Sources, and A2) Application Testbeds. The strategic plan for research of the EUV ERC combines the expertise in EUV lasers and EUV HHG sources of the CSU and CU groups, with the expertise in EUV optics and synchrotron sources of the UC Berkeley group. Sources and testbeds involving EUV lasers are developed at CSU, while sources and testbeds involving HHG sources are developed at CU. Often the development of a specific type of source has contributions from all three groups and from members of the partner institutions.
Deliverables resulting from the center’s research work will include:
The successful realizations of the main goals of the research
plan will result in enabling EUV practical tools and techniques that could
revolutionize numerous aspects of science and technology and spawn new industries.