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SEMICONDUCTORS

Processes and materials for manufacturing advanced semiconductor chips, and new device architecture information.

SEMICONDUCTOR NEWS & FEATURES

Novellus film deposition tool suits 3D Flash device fab

02/07/2012 Novellus debuted the VECTOR Strata dielectric deposition tool for high-volume VIM Flash manufacturing. VECTOR Strata aims for ultra-smooth films with exceptional defect performance, enabling in-situ deposition of the alternating silicon-based layers used in the formation of the VIM structure.

Semiconductors to use most ultrapure water in 2012

02/07/2012

The electronics industry will edge out coal-fired boilers as the biggest purchaser of ultrapure water systems and consumables in 2012, according to the McIlvaine report: Ultrapure Water World Markets.

EVG LED mask aligner offers COO improvement in gen-2

02/07/2012

EVG uncrated the EVG620HBL Gen II fully automated mask alignment system for volume LED manufacturing. The second generation tool offers 55% higher wafer output per square meter of cleanroom space occupied, EVG reports.

Silicon wafer revenues increased, shipments tapered in 2011

02/07/2012

Worldwide silicon wafer revenues improved 2% YOY, shows the SEMI Silicon Manufacturers Group. Worldwide silicon wafer area shipments, however, decreased 3%, indicating a loss of momentum in H2 2011, said Kazuyo Heinink, SEMI SMG.

SemiLEDs, LG Siltron, Epistar install Veeco MOCVD tools

02/07/2012

Veeco Instruments (Nasdaq:VECO) reported 3 wins for its TurboDisc K465i GaN MOCVD tool : the same systems will be used for high-volume LED fab, GaN-on-Si research, and Si-based LED development.

Gigaphoton launches ArF excimer laser for multi-patterning immersion lithography

02/06/2012

Gigaphoton uncrated the GT63A next-generation ArF excimer laser for multi-patterning immersion lithography scanners.

Record semiconductor sales in 2011, says SIA

02/06/2012

The Semiconductor Industry Association (SIA) shows 2011 worldwide semiconductor sales hit $299.5 billion, a 0.4% year-on-year increase and new record.

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