News Stories
Double Trouble
Competing double-patterning approaches are causing challenges for DFM tools vendors at 20nm and 14nm; the problems get worse at 10nm. Luigi Capodieci, R&D fellow at GlobalFoundries, said ideas to use triple patterning may never actually be implemented. “Triple patterning makes for good paper, but I’m not sure the solution is cost-effective.”
Analyst: EUV Misses 14nm Node and Now Aims for 10nm
Extreme ultraviolet (EUV) lithography has missed the 20nm — and the 14nm — process nodes, according to an analyst, who added that the tool technology is down but not out of the running. Now, the industry is shooting for the insertion of EUV at the 10nm node, according to the analyst. ASML and Cymer claim they have made major progress, however.
SPIE Panel: Time is Ripe for Alternative NGLs
The IC industry needs to think differently about lithography, according to a panel at the SPIE Advanced Lithography conference. Lithography experts said that the market is ripe for an alternative NGL solution. The panelists represented the various alternative NGL technologies, such as direct self-assembly (DSA), maskless and nanoimprint.
Samsung Resets EUV Roadmap for Memory Scaling
Samsung wants extreme ultraviolet (EUV) lithography to scale DRAM and NAND flash, although the company has reset its roadmap for the patterning technology. In its latest roadmap, Samsung wants an EUV tool with a 166 Watt source by the first half of 2013 and a 250 Watt source by the second half of next year.
Foundry Rivals Say EUV Not Ready for Prime Time
Two foundry vendors — GlobalFoundries and TMSC — are clearly rivals and have different strategies in the market. But lithography experts from both foundry vendors agree on one thing: The progress for extreme ultraviolet (EUV) lithography is going slower than expected and the technology is not ready for prime time right now.
Semiconductor Manufacturing Research News
Stanford researchers used plasmonics to create nanowire meshes. UCSD engineers have built low-power lasers small enough to be used as optical circuits in future integrated circuits. Chemical engineers at Stanford have learned to strain the lattice of organic semiconductors by packing the molecules closer together.
Qualcomm: Foundry High-K Yields are ‘Not Alarming’
Addressing IC-manufacturing from the fabless angle, Qualcomm said the industry needs EUV sooner than later. In addition, the early yields for 28nm, high-k processes at the foundries are within the normal range of defect densities and are “not alarming,” said Jim Clifford, senior vice president and general manager of operations at Qualcomm.
Intel Wants EUV but Keeps Lithography Options Open
Intel Corp. reiterated its plans to insert extreme ultraviolet (EUV) lithography as its first choice for the 10nm node, but the company is keeping its options open. The chip giant is devising a back-up plan. If EUV remains late to the party, Intel said it could shift gears and move to multi-patterning.
Top Stories
Applied Forsees Strong Year for Silicon Systems
Foundries are driving Applied’s semiconductor equipment operation to new heights. “Die sizes are up about 50 percent year-on-year for the application processors used in smartphones, which means that the foundries have got to move to leading-edge processes very, very quickly,” said CEO Mike Splinter.
TowerJazz Makes Bid for 300mm Fab in India
Specialty foundry vendor TowerJazz Inc. has made a bid with a leading Indian infrastructure conglomerate to build and operate a 300mm fab in India. This will enable the Israeli company to offer 300mm wafer sizes, 90nm analog technology and companion chips at from 65nm to 45nm.
Molecular Imprints Debuts Roll-to-Roll Lithography
Looking for new markets, Molecular Imprints Inc. (MII) has introduced what it calls a roll-to-roll lithography system based on its nanoimprint technology. The system, dubbed the LithoFlex 100, is a high-volume unit capable of producing polarized glass or films for LCDs, said Mark Melliar-Smith, president and CEO of MII.
Directed Self-Assembly to Grab Limelight at SPIE
Directed self-assembly (DSA) technology is expected to take center stage at next week’s SPIE Advanced Lithography conference. Applied, IBM and others will give papers on DSA. And in another major development, IMEC has announced the implementation of the world’s first 300mm fab-compatible DSA process line.
IC Companies Close 49 Wafer Fabs from 2009-2011
IC Insights said the industry has been “paring down” older capacity, with 49 fabs closed in the 2009-2011 period. Seventeen fabs were closed in Japan and another 17 in North America, followed by Europe with 12 and South Korea with three.
Nikon Pushes 193nm Immersion, Explores 6.7nm EUV
Nikon Corp. has outlined its roadmap, saying that it will continue to push 193nm immersion lithography for at least three more tool generations. The company also disclosed that it has begun to conduct research on 450mm lithography tools as well as 6.7nm wavelength EUV.
Direct-write E-beam Program Claims Progress
The Imagine partnership to develop direct-write e-beam lithography said it has created 22nm lines, spaces, and contact holes using a first-generation Mapper exposure tool. The program expects to take delivery of a pre-production tool, called Matrix, as the program continues for another three years.
TI, Infineon, Skyworks, On Semi Gain in Analog Rankings
Total global analog revenue remained nearly flat from 2010 to 2011, reaching $42.3 billion for the year, according to Databeans. Texas Instruments, the leader in the market for analog ICs, ended 2011 with a slight increase in year-over-year analog sales, growing 5 percent to $6.5 billion, according to the new rankings from Databeans.
Common Platform Tech Forum Set for March 14
The 2012 Common Platform Technology Forum, planned for March 14 at the Santa Clara Convention Center, will feature speakers from IBM, Samsung Electronics, and GlobalFoundries, as well as a Partner Pavilion.
Novellus Brings Vector Strata to VIM Deposition
Novellus unveiled a dielectric deposition tool, the Vector Strata, optimized for vertically integrated memory (VIM) flash devices. The tool “will allow acceleration of the technology into high-volume production,” Novellus said.
Technology Features
Round Tables
Experts At The Table: Stacked Die And The Supply Chain
Last of three parts: Blurring the lines between packaging and manufacturing; progress on cross-disciplinary test and tools; issues in packaging, interconnect and test; who’s in charge and driving changes; why tools are lagging for creating TSVs; who owns what; debate over whether the supply chain will grow or shrink.
Experts At The Table: Stacked Die And The Supply Chain
Second of three parts:Starting points for stacking; where standards are needed; 2.5D vs. 3D stacks; the role of test; the challenge of interconnects; potential power shifts in terms of who’s in control.
Experts At The Table: Stacked Die And The Supply Chain
First of three parts: The growing need for standards; questions about cost and business relationships; new terminology; who’s responsible when something goes wrong.
Experts At The Table: Improving Yield
Last of three parts: Stress effects from TSVs; testing stacked die; simplifying design rules and shifting from what’s not allowed to what is; the effect of 450nm and re-use on total cost.
Experts At The Table: Improving Yield
Second of three parts: Improving information exchange; the impact of software; dark silicon; through-silicon vias and electrical effects; stacking die in 2.5D and 3D configurations; testing issues; DFM challenges; the limitations of interposers.
Experts At The Table: Improving Yield
First of three parts: Risks of early adopters; tighter coupling of design and manufacturing; expected yields at 20nm and in stacked die; effects of double-patterning and variability; new rules and PDKs.
Experts At The Table: Multi-Foundry Strategies
Last of three parts: The impact of 3D stacking and 3D structures; business changes and commoditization; competitive concerns; multisourcing at the leading edge.
Experts At The Table: Multi-Foundry Strategies
Second of three parts: Risk and return on investment; big chipmakers vs. midsize companies; disaggregation vs. re-aggregation; the impact of 2.5D and 3D stacking.
Experts At The Table: Multi-Foundry Strategies
First of three parts: Where handoffs make sense; big customers dictate the process spec; challenges with IP; role of the ecosystem.
Experts At The Table: Yield Issues
Last of three parts: The growing importance of DFM; challenges in 3D stacking; trust and the sharing of data; who owns the problem?
Trends Research
EUV Mask Defects: What Can We Do About Them?
Although mask makers have made masks for decades, reducing their defectivity remains a challenge. Why? The simple answer is their reflectivity and the process of making EUV mirrors.
Is Test the Missing Link in Yield Optimization?
Mentor Graphics and Samsung announce a yield-improvement approach that’s based on mined test data.
EUVL Workshop Considers Improvements to EUV Sources
Participants at the 2011 International Workshop on EUVL — representing universities, national labs, tool suppliers and chip manufacturers — discussed ways to address current technical challenges for inserting EUVL into high-volume manufacturing.
Executives at Semico Summit See Challenges
Executives from GlobalFoundries, Microchip, STMicroelectronics, Freescale, Intel, Altera, MIPS, Xilinx, MoSys, and Mentor offered their opinions on the future challenges facing the semiconductor industry, at the Semico Summit, held in early May in Phoenix.
2011 SPIE Advanced Lithography – EUVL Conference Review
EUV Lithography expert Vivek Bakshi provides his roundup of EUV-related developments at the SPIE Advanced Lithography conference.
Not Your Father’s DFM
Using feedback mechanisms among a variety of EDA tool flows would allow designers to optimize incremental tapeouts to the benefit of the entire design-manufacturing ecosystem.
FinFETs vs ETSOI Debate Heats Up
Semiconductor technologists face a crossroads at the 14nm node, when partially depleted, planar transistors are unlikely to deliver improvements in performance and power. Technologists at the recent International Electron Devices Meeting (IEDM) in San Francisco debated the relative merits of FinFETs (tall) versus extremely thin silicon on insulator, or ETSOI (thin).
Qualcomm Shies Away from High-k at 28nm
Qualcomm CDMA Technologies said it will not use a high-k/metal gate (HKMG) process for most of the chips it makes at the 28nm node, sticking with a poly/SiON gate stack. The company described the rationale behind the strategy – which because of Qualcomm’s size will have a major impact on the foundry business — at the 2010 International Electron Devices Meeting (IEDM) held in San Francisco.
Race Intensifies to Develop EUV Source
The technology competition to supply the source of EUV radiation for the next-generation lithography tools has long been divided between the laser-produced plasma (LPP) approach, favored by Cymer Inc. (San Diego) and Gigaphoton Inc. (Oyama, Japan), and the discharge-produced plasma (DPP) method supported by Xtreme Technologies GmbH (Aachen, Germany).
Podcasts/Videos/Webcasts
Time For FD-SOI?
Soitec COO Paul Boudre discusses what will be the best solution for 20nm – fully depleted silicon on insulator or bulk 3D transistors? The answer will likely include both.
Multisourcing Options
Just how easy is to move designs from one foundry to another? It depends who you ask.
IC Yield Issues
What problems are we likely to face at future nodes and with 3D structures?
3D Stacking: Reality Check
Just how real is 3D stacking and what are the main hurdles that need to be solved.
What’s New At Semicon
Karen Savala, president of SEMI Americas, looks at what’s new at Semicon this year, how the show is changing and what to look out for.
The Challenge of 3D
Juan Rey, senior director of engineering for Mentor Graphics’ Design To Silicon Division, talks about 3D stacking and 3D structures on chips.
State Of The Semiconductor industry
Jonathan Davis, executive vice president of SEMI, drills down into the state of the chip industry, what’s driving the changes and what the big issues are for manufacturing and design in the future.
Going Solar
Bettina Weiss, who heads SEMI’s solar effort, talks about what’s new at Semicon and Intersolar North America, how far the industry has progressed and what stands in the way of widespread adoption of solar technology.
2.5D Stacking and Test
Michael Buehler-Garcia, director of Calibre Design Solutions marketing at Mentor Graphics, talks about the challenges in building 2.5D stacks and how testing them will become a major headache.