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Welcome to the Silicon-Based MEMS site at Sandia National Laboratories.
Sandia is a world leader in the technology required for development, fabrication, and production of microelectronic, photonic, micromachine and microsensor devices and products.
Sandia also has the ability to integrate these devices into complete microsystems. Microsystems that sense, think, act, communicate and self-power will make our nation more secure, revolutionize our industries, and will make the revolution in biology a reality.
Distinguishing strengths include materials growth and development, device and product design, fabrication technologies for silicon and compound semiconductor devices, advanced packaging technologies, reliability, failure analysis and product delivery for extreme environments.
Focus Areas
 µElectroMechanical
Inertial Sensors, Non-inertial Sensors, Actuators, Switches, Relays, ... |
BioMEMS / µFluidics
Sensing anything, anytime, anywhere at multiple scales |
RF MEMS
Resonators, Oscillators, Filters, Switches,... |
MicroOptics
MEMS Optical Microphone, Nano-Grating Based Low-G Inertial Sensor |
Enabling Technologies
Design
MEMS Layout and Design Tools, Facilities, MEMS Shortcourses, ... |
Process Integration & Fabrication
SUMMiT V™, Facilities, SwIFT™, Passive Waveguide, Si AlN for RF MEMS, Bulk Micromachining, Molded Tungsten, 3D Photonic Lattice... |
Reliability, Testing & Characterization
Reliability Testing, MEMS Measurement Tools and Methods, Operational Characterization, Services... |
Integration & Packaging
MEMS Advanced Packaging, Facilities, ... |
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